SUSS MicroTec Enters €5.4B Wafer-Cleaning Market with GT200 Launch
Garching, Germany – October 06, 2026 -- SUSS MicroTec SE has launched its first wafer-level cleaning system, the GT200, marking the company's entry into a wafer-cleaning market it values at approximately €5.4 billion, according to research from SUSS and Yole.
SUSS extends photomask expertise into wafer-level cleaning for the first time
The GT200 forms the opening platform of a new GreenTec Solutions product line, combining two established SUSS process technologies, TurbulenStrip and CrustBuster, previously confined to the company's Photomask Solutions segment. TurbulenStrip handles batch soaking and single-wafer resist removal, while CrustBuster applies patented in-situ UV technology to strip organic residues directly at the wafer surface. SUSS says the hybrid approach cuts chemical consumption and eliminates hazardous acids compared with conventional wafer-cleaning methods.