Seattle – – October 12, 2026 -- EHT Semi has embedded Bird RF measurement probes in its semiconductor power platforms, delivering power regulation to within 2% of the set point through fast, dynamic load changes.
Embedded probe covers power, voltage, current and impedance
The integration spans the OrionTM Direct RFTM System and EHT Semi's tailored waveform generators. An embedded Bird probe with NIST-traceable calibration serves as the primary measurement of power, voltage, current, and impedance. The probe is available now in selected OrionTM Direct RFTM System and tailored-waveform power systems.
Single reference runs from factory calibration to fab production
Building the probe into the power system gives chipmakers one measurement reference across factory calibration, system validation, and test and measurement at the fab. EHT Semi says this improves confidence in the RF power data used to characterize, verify, and control advanced processes.
"Advanced process control depends on knowing that the power measured during system calibration corresponds to the power monitored in production," said Timothy Ziemba, CEO of EHT Semi.
Bird CEO Mike Simpson said the integration will give equipment and process teams greater confidence in the data linking calibration, development, and production. The companies describe the work as a collaborative relationship focused on applying Bird's RF measurement technology to semiconductor manufacturing.
Customers gain access to probe data for analytics and AI control
Customers can access the measurement data generated by the integrated probes. EHT Semi says the data can support advanced diagnostics, process analytics, and the development of AI-accelerated feedback and control strategies, giving process teams equipment-level power data for adaptive control development.